Vacuum Gate Valve

Vacuum gate valve is a valve specially designed for vacuum systems. It realizes fluid on-off control through vertical lifting of the gate plate. Its core function is to ensure pipeline sealing and medium isolation in a vacuum environment. Its sealing performance is better than that of ordinary gate valves, and the applicable vacuum range is usually 10⁻⁴~10⁻7 Pa.

Core structure and working principle
‌Sealing design‌:
Adopting a double sealing structure: a vacuum sealing ring (self-expansion and compression design) is added to the valve stem packing, and the valve seat and the gate are self-sealed by the medium pressure (the medium pressure presses the gate to the valve seat when closed);
The forced sealing type needs to rely on external pressure (such as bolt preload) to enhance the sealing effect.
‌Key components‌:
The valve body is usually made of stainless steel (such as 304, 316L), which is resistant to vacuum environment corrosion;
The gate and valve seat are made of carbide or polytetrafluoroethylene (PTFE) to reduce the risk of leakage.

 

Vacuum gate valve

 

Applications
Vacuum coating equipment: used for vacuum isolation and gas flow control of coating chambers;
Semiconductor manufacturing: sealing and cutting off of high-purity gas delivery systems;
Scientific research experimental equipment: vacuum pipeline management of particle accelerators, vacuum furnaces and other equipment

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